Micro Electret Power Generator
نویسندگان
چکیده
We present the first micromachined rotational electret power generator, linearized theoretical model of electret power generation, and novel method to produce uniformly charged electret. We also improved our previously developed [ I , 21 thin film Teflon AF 1601-S electret technology with respect to dielectric thickness, charge uniformity, and processability. In demonstration, our prototype power generator successfully generated > 25pW with electret thickness of 9pm, effective charge density of -2.8xlO4C/m2, and rotational speed of4170RPM.
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تاریخ انتشار 2004